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Semiconductor

Virtual metrology, soft sensor, cross-tool transfer, process estimation, edge AI for semiconductor manufacturing.

Demo Semiconductor Virtual Metrology

Virtual metrology for plasma etch

Estimating etch results in between physical measurements, and carrying the model across different tools.

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Imprint
Entrox Systems GmbH (in formation)
Pelkovenstraße 71, 80992 Munich, Germany
Managing Directors: Sebastian Baur, Daniel Köglmayr
Email: info@entrox-systems.com · Phone: +49 170 6936478
Commercial Register: Amtsgericht München, HRB number pending
VAT ID: pending
Responsible for content pursuant to § 18 (2) MStV: Tamon Nakano, Pelkovenstraße 71, 80992 Munich, Germany